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Formation of Zr-disilicide by high-current Zr ion implantation into Si using metal vapor vacuum arc ion source

✍ Scribed by K.Y Gao; H.N Zhu; B.X Liu

Book ID: 114170160
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 146 KB
Volume: 140
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00136-0

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