Formation of titanium disilicide during rapid thermal annealing, observed by in-situ stress measurements

✍ Scribed by J.F. Jongste; G.C.A.M. Janssen; S. Radelaar

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 462 KB
• Volume: 53
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90265-l