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Formation of titanium and cobalt germanides on Si (100) using rapid thermal processing

✍ Scribed by S. P. Ashburn; M. C. Öztürk; J. J. Wortman; G. Harris; J. Honeycutt; D. M. Maher


Book ID
112822240
Publisher
Springer US
Year
1992
Tongue
English
Weight
699 KB
Volume
21
Category
Article
ISSN
0361-5235

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