✦ LIBER ✦
Formation of TiSi2 from titanium and amorphous silicon layers for local interconnect technology
✍ Scribed by A.A. Bos; N.S. Parekh; A.G.M. Jonkers
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 664 KB
- Volume
- 197
- Category
- Article
- ISSN
- 0040-6090
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