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Formation of the torus-shaped structure in normal glow discharge

โœ Scribed by S. T. Surzhikov; A. S. Petrusev


Book ID
110206809
Publisher
SP MAIK Nauka/Interperiodica
Year
2007
Tongue
English
Weight
209 KB
Volume
52
Category
Article
ISSN
1028-3358

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โœ Changkang Pan; Fred L. King ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 573 KB

The formation of ions following the termination of power in a pulsed glow discharge ion source is investigated. The populations of ionized species containing sputtered atoms M(+), M 2 (1) :, and MAr(+) are observed to maximize after the termination of discharge power. Collisions involving sputtered