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Formation of Ta/Ti/Al/Mo/Au ohmic contacts to an AlGaN/AlN/GaN heterostructure grown on a silicon substrate

✍ Scribed by Osipov, K. Yu.; Velikovskiy, L. E.; Kagadei, V. A.


Book ID
121656734
Publisher
Springer
Year
2014
Tongue
English
Weight
461 KB
Volume
48
Category
Article
ISSN
1063-7826

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