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Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects

โœ Scribed by Ming Zhu; Weili Liu; Zhitong Song; Ricky K.Y. Fu; Paul K. Chu; Chenglu Lin


Book ID
113788595
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
382 KB
Volume
59
Category
Article
ISSN
0167-577X

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