✦ LIBER ✦
Formation of silicon nanodots from dysprosium-doped amorphous SiCxOy films grown by hot-filament assisted chemical vapor deposition of CH3SiH3 and Dy(DPM)3 gas jets
✍ Scribed by Yoshifumi Ikoma; Takayoshi Masaki; Shinji Kawai; Teruaki Motooka
- Book ID
- 108060267
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 475 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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