Formation of Semi-Insulating Layers on Semiconducting β-Ga 2 O 3 Single Crystals by Thermal Oxidation

✍ Scribed by Oshima, Takayoshi; Kaminaga, Kenichi; Mukai, Akira; Sasaki, Kohei; Masui, Takekazu; Kuramata, Akito; Yamakoshi, Shigenobu; Fujita, Shizuo; Ohtomo, Akira

• Book ID: 120228619
• Publisher: Institute of Pure and Applied Physics
• Year: 2013
• Tongue: English
• Weight: 741 KB
• Volume: 52
• Category: Article
• ISSN: 0021-4922
• DOI: 10.7567/JJAP.52.051101