✦ LIBER ✦
Formation of self-aligned TiSi2 contacts to Si at low temperatures using TiCl4 and SiH4 with selective in-situ predeposition of SixGe1−x
✍ Scribed by G.C. Xing; Mehmet C. Öztürk
- Book ID
- 119125054
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 413 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-577X
No coin nor oath required. For personal study only.