✦ LIBER ✦
Formation of self-aligned cobalt silicide in normal flow nitrogen furnace
✍ Scribed by Fann-Mei Yang; Mao-Chieh Chen
- Book ID
- 103429972
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 815 KB
- Volume
- 207
- Category
- Article
- ISSN
- 0040-6090
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