Formation of PZT thin-film capacitors over W-plugs and low-voltage operation for high-density LSIs

✍ Scribed by Katsuhiro Aoki; Tomoyuki Sakoda; Satoshi Hashimoto; Yukio Fukuda; Osamu Handa; Tomomasa Emoto

• Book ID: 101357352
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 469 KB
• Volume: 83
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/1520-6432(200008)83:8<1::aid-ecjb1>3.0.co;2-#