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Formation of porous silicon on patterned substrates

✍ Scribed by M Krüger; R Arens-Fischer; M Thönissen; H Münder; M.G Berger; H Lüth; S Hilbrich; W Theiss

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 860 KB
Volume: 276
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)08066-x

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