Formation of Porous Silicon Filter Structures with Different Properties on Small Areas

✍ Scribed by R. Arens-Fischer; M. Krüger; M. Thönissen; V. Ganse; D. Hunkel; M. Marso; H. Lüth

• Book ID: 110277924
• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 160 KB
• Volume: 7
• Category: Article
• ISSN: 1380-2224
• DOI: 10.1023/a:1009651224071