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Formation of periodic steps with a unit-cell height on 6H–SiC (0001) surface by HCl etching

✍ Scribed by Nakamura, Shun-ichi; Kimoto, Tsunenobu; Matsunami, Hiroyuki; Tanaka, Satoru; Teraguchi, Nobuaki; Suzuki, Akira


Book ID
121269456
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
843 KB
Volume
76
Category
Article
ISSN
0003-6951

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