✦ LIBER ✦
Formation of p-type layer by KrF excimer laser doping of carbon into GaAs in CH4gas ambient
✍ Scribed by K. Sugioka; K. Toyoda; K. Tachi; M. Otsuka
- Book ID
- 104842148
- Publisher
- Springer
- Year
- 1989
- Tongue
- English
- Weight
- 683 KB
- Volume
- 49
- Category
- Article
- ISSN
- 1432-0630
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