Formation of p-n junctions and silicides in silicon using a high performance laser beam homogenization system

✍ Scribed by M. Wagner; A. Witzmann; H.D. Geiler; K.-H. Heinig

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 331 KB
• Volume: 43
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90222-5