✦ LIBER ✦
Formation of oxynitride layers in a RF plasma planar reactor for future Si and SiC MOS structures
✍ Scribed by T. Bieniek; R. B. Beck; A. Jakubowski; P. Konarski; M. Cwil; P. Hoffmann; D. Schmeisser
- Book ID
- 111502943
- Publisher
- Allerton Press, Inc.
- Year
- 2007
- Tongue
- English
- Weight
- 389 KB
- Volume
- 29
- Category
- Article
- ISSN
- 1063-4576
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