Formation of New Donors and Structural Defects During Low-Temperature Oxygen Precipitation in CZ-Grown Silicon

✍ Scribed by Kamiura, Y. ;Hashimoto, F. ;Yoneta, M.

• Publisher: John Wiley and Sons
• Year: 1991
• Tongue: English
• Weight: 720 KB
• Volume: 123
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211230202