Formation of Nano SiC Particles by Laser
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Y. Kamlag; A. Goossens; I. Colbeck; J. Schoonman
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Article
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2003
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John Wiley and Sons
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English
β 389 KB
## Abstract Nanocrystals of cubic silicon carbide (SiC) are formed using laserβassisted gasβphase synthesis. A CO~2~ laser beam is mechanically chopped to obtain pulsed infrared (IR) excitation. Silane (SiH~4~) and acetylene (C~2~H~2~) have been used as precursors. The SiC particles formed adopt th