Formation of micrometer sized crater shaped pits in silicon by low-energy 22Ne+ implantation and electron beam annealing

✍ Scribed by A. Markwitz; V.J. Kennedy; H. Baumann

• Book ID: 114167051
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 162 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00719-5