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Formation of Metal Oxide Particles in Atomic Layer Deposition During the Chemisorption of Metal Chlorides: A Review

✍ Scribed by Riikka L. Puurunen

Publisher: John Wiley and Sons
Year: 2005
Weight: 8 KB
Volume: 36
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200518202

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✦ Synopsis

Abstract

For Abstract see ChemInform Abstract in Full Text.

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