✦ LIBER ✦
Formation of insulating oxygen-containing layer on the silicon wafer surface using low-temperature hydrogenation
✍ Scribed by O. Zinchuk; A. Saad; N. Drozdov; A. Fedotov; S. Kobeleva; A. Mazanik; A. Patryn; V. Pilipenko; A. Pushkarchuk
- Book ID
- 106398169
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 206 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4522
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