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Formation of FeSi and FeSi2 films from cis-Fe(SiCl3)2(CO)4 by MOCVD –precursor versus substrate control

✍ Scribed by Christian Erich Zybill; Wei Huang


Book ID
108331806
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
489 KB
Volume
291
Category
Article
ISSN
0020-1693

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