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Formation of dust layers in the near-electrode area of RF-discharge

✍ Scribed by X. G. Adamovich; O. S. Vaulina; I. E. Dranzhevsky

Publisher: Springer
Year: 2004
Tongue: English
Weight: 278 KB
Volume: 54
Category: Article
ISSN: 0011-4626
DOI: 10.1007/bf03166450

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