✦ LIBER ✦
Formation of Conducting and Insulating Layered Structures in Si by Ion Implantation: Process Control Using FTIR Spectroscopy
✍ Scribed by Katsidis, C. C.; Siapkas, D. I.; Robinson, A. K.; Hemment, P. L. F.
- Book ID
- 121456823
- Publisher
- The Electrochemical Society
- Year
- 2001
- Tongue
- English
- Weight
- 266 KB
- Volume
- 148
- Category
- Article
- ISSN
- 0013-4651
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