Formation of c-BN Film on Fe with Seeped Boron Using RF Plasma CVD Thermally Assisted by a Tungsten Filament

✍ Scribed by Wang, Wanlu ;Ji, Rongbin ;Gao, Jingyin ;Liao, Kejun ;Zhang, Xiaolan

• Publisher: John Wiley and Sons
• Year: 1993
• Tongue: English
• Weight: 232 KB
• Volume: 136
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211360233