✦ LIBER ✦
Formation of buried insulating layers by high dose oxygen implantation under controlled temperature conditions : M. Bruel, J. Margail, J. Stoemenos, P. Martin and C. Jaussaud. Vacuum35 (12), 589 (1985)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 120 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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