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Formation of Amorphous Silicon by Ion Bombardment as a Function of Ion, Temperature, and Dose

✍ Scribed by Morehead, F. F.

Book ID: 125437144
Publisher: American Institute of Physics
Year: 1972
Tongue: English
Weight: 705 KB
Volume: 43
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1661223

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