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Formation mechanism of SiGe nanorod arrays by combining nanosphere lithography and Au-assisted chemical etching

✍ Scribed by Chih-Chung Lai; Yun-Ju Lee; Ping-Hung Yeh; Sheng-Wei Lee


Book ID
115021250
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
566 KB
Volume
7
Category
Article
ISSN
1931-7573

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