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Formation and Role of a Hollow-Cathode Plasma Plug in Mass-Spectrometric Analysis

✍ Scribed by G. G. Sikharulidze; A. E. Lezhnev

Book ID
111544313
Publisher
SP MAIK Nauka/Interperiodica
Year
2003
Tongue
English
Weight
35 KB
Volume
58
Category
Article
ISSN
1061-9348

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## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit