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Formation and properties of diffusion coatings applied to steels by boronizing in melts

โœ Scribed by V. V. Shirokov; M. I. Kitsak; E. T. Rudkovs'kyi; L. A. Arendar

Book ID
105544116
Publisher
Springer
Year
1999
Tongue
English
Weight
883 KB
Volume
35
Category
Article
ISSN
1573-885X

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## Abstract The combination of Ge preโ€amorphization implantation, lowโ€energy boron implantation, and nonโ€melt laser annealing is a promising method for forming ultrashallow p^+^/n junctions in silicon. In this study, shallow p^+^/n junctions were formed by nonโ€melt annealing implanted samples using