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Formation and Properties of an Oxide Film on an Si3N4Surface under Thermal Oxidation

✍ Scribed by A. E. Ivanchikov; A. M. Kisel'; V. I. Plebanovich; V. I. Pachynin; V. E. Borisenko

Book ID
110442229
Publisher
Springer
Year
2003
Tongue
English
Weight
267 KB
Volume
32
Category
Article
ISSN
1063-7397

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