✦ LIBER ✦
Formation and decomposition of a Si hydride layer during vacuum ultraviolet-excited Si homoepitaxy from disilane
✍ Scribed by Housei Akazawa
- Book ID
- 117219465
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 154 KB
- Volume
- 427-428
- Category
- Article
- ISSN
- 0039-6028
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