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Form-birefringence structure fabrication in GaAs by use of SU-8 as a dry-etching mask

✍ Scribed by Pang, Lin ;Nezhad, Maziar ;Levy, Uriel ;Tsai, Chia-Ho ;Fainman, Yeshaiahu


Book ID
115352028
Publisher
The Optical Society
Year
2005
Tongue
English
Weight
452 KB
Volume
44
Category
Article
ISSN
1559-128X

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