✦ LIBER ✦

Focussed ion beam based fabrication of micro-electro-mechanical resonators

✍ Scribed by Daniel Grogg; Nicoleta Diana Badila-Ciressan; Adrian Mihai Ionescu

Publisher: Springer-Verlag
Year: 2007
Tongue: English
Weight: 436 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0464-4

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Quantum dot micro-LEDs for the study of

Quantum dot micro-LEDs for the study of few-dot electroluminescence, fabricated by focussed ion beam

✍ M. Vitzethum; R. Schmidt; P. Kiesel; P. Schafmeister; D. Reuter; A.D. Wieck; G.H 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 174 KB

We present ÿrst results from a micrometer sized micro-LED fabricated for the electroluminescence (EL) investigation of very few to one self-assembled quantum dot. Utilizing focussed ion beam (FIB) implantation we were able to fabricate a LED consisting of crossed p-and n-doped stripes of a few micro

Analysis of microfabricated textured mul

Analysis of microfabricated textured multicrystalline beams. II. Probabilistic approach: Mirfendereski, D.; Der Kiureghian, A.; Ferrari, M.; Jardine, A. P.; Johnson, G. C.; Crowson, A.; Allen, M. Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems; 1992 Apr 28; San Francisco, CA: Mater. Res. Soc. Pittsburgh, PA; 1992: 97–101. For pt. I see ibid., vol. 276, p. 91 (1992)

📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 142 KB