✦ LIBER ✦
Focused ion beam sample preparation, transmission electron microscopy and electron energy loss spectroscopy analysis of advanced CMOS silicon technology interconnections
✍ Scribed by Roland Pantel; Geoffroy Auvert; Guy Mascarin
- Book ID
- 114155654
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 608 KB
- Volume
- 37-38
- Category
- Article
- ISSN
- 0167-9317
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