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Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.

✍ Scribed by G.Ben Assayag; P. Sudraud; J. Gierak; D. Remiens; L. Menigaux; L. Dugrand


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
409 KB
Volume
11
Category
Article
ISSN
0167-9317

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