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Focused ion beam lithography for two dimensional array structures for photonic applications

✍ Scribed by S. Cabrini; A. Carpentiero; R. Kumar; L. Businaro; P. Candeloro; M. Prasciolu; A. Gosparini; C. Andreani; M. De Vittorio; T. Stomeo; E. Di Fabrizio

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 274 KB
Volume: 78-79
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.12.006

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