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Fluxes of Charged Particles in Two-Chamber ICP Discharge in Oxygen

✍ Scribed by Bogdanov, Evgeny A.; Chirtsov, Alexander S.; Kudryavtsev, Anatoly A.

Book ID: 120309133
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 360 KB
Volume: 39
Category: Article
ISSN: 0093-3813
DOI: 10.1109/TPS.2011.2155679

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