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Flux control and calibration of an As effusion cell in a molecular beam epitaxy system for GaAs and AlGaAs with a quadrupole mass spectrometer

✍ Scribed by Ch. Heyn; M. Harsdorff


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
418 KB
Volume
133
Category
Article
ISSN
0022-0248

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