Fluorohydrogenated amorphous carbon (a-C:H, F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride

✍ Scribed by Jayshree Seth; S.V. Babu

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 660 KB
• Volume: 230
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90497-d