✦ LIBER ✦
Fluorine passivation of metal surface for self-cleaning semiconductor equipment : N. Miki, M. Maeno, K. Maruhashi, Y. Nakagawa and T. Ohmi. IEEE Trans. Semiconductor Mfg3(1), 1 (1990)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 136 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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