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Fluorine-enhanced photo-oxidation of silicon under ArF excimer laser irradiation in an O2+NF3 gas mixture
✍ Scribed by Morita, M.; Aritome, S.; Tanaka, T.; Hirose, M.
- Book ID
- 121341653
- Publisher
- American Institute of Physics
- Year
- 1986
- Tongue
- English
- Weight
- 411 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.97572
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