Fluorine diffusion assisted by diffusing silicon on the Si(111)-(7×7) surface

✍ Scribed by Fujikawa, Y.; Kuwano, S.; Nakayama, K. S.; Nagao, T.; Sadowski, J. T.; Bahktizin, R. Z.; Sakurai, T.; Asari, Y.; Nara, J.; Ohno, T.

• Book ID: 120629078
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 701 KB
• Volume: 129
• Category: Article
• ISSN: 0021-9606
• DOI: 10.1063/1.3039873