Fluorine-contained films with high water-repellency and transparency prepared by RF plasma-enhanced CVD

✍ Scribed by A. Hozumi; N. Kakinoki; Y. Asai; O. Takai

• Book ID: 104690990
• Publisher: Springer
• Year: 1996
• Tongue: English
• Weight: 220 KB
• Volume: 15
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1007/bf00264110