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Fluoride accelerated nitridation of silicon

✍ Scribed by D. Campos-Loriz; S. P. Howlett; F. L. Riley; F. Yusaf

Publisher: Springer
Year: 1979
Tongue: English
Weight: 999 KB
Volume: 14
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00737021

No coin nor oath required. For personal study only.

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