Microwave plasma fluidized bed arc-PVD c
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Zeljko Pajkic; Hannes Wolf; Thorsten Gerdes; Monika Willert-Porada
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Article
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2008
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Elsevier Science
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English
β 817 KB
A novel process for deposition of thin AlN and Al coatings on particulate carbon materials by means of an atmospheric pressure microwave plasma fluidized bed treatment is reported. The substrate powder and a fine aluminum powder are mixed and fluidized together in microwave plasma. Argon plasma yiel