✦ LIBER ✦
Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
✍ Scribed by Graves, David B.
- Book ID
- 118254508
- Publisher
- American Institute of Physics
- Year
- 1987
- Tongue
- English
- Weight
- 1005 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.339111
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