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Fluctuations and correlations in sputtering and defect generation in collision cascades in Si

✍ Scribed by R. Chakarova; I. Pázsit

Book ID: 114172153
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 606 KB
Volume: 164-165
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)01137-4

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